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Semiconductors & Solar
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HomeVaccum Gauges, Sensors & MetersSemi Conductors & Solar VSC43MA4 – Wafer Bonding
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thyracont-vacuum-instruments

VSC43MA4 – Wafer Bonding

Vacuum Transducer ● Piezo ● 1400 to 1 mbar ● 4-20 mA output

The compact VSC43 piezo vacuum transducer is used for measuring absolute pressure in the rough vacuum range. Due to its durable ceramic sensor it is nearly insensitive to dirt and contamination.

Wafer bonding is a procedural step in semiconductor technology, where two wafers are joined. For certain applications like the encapsulation of chip sensors this process is carried out under vacuum.

Challenge

When loaded the bond chamber is evacuated in a bypass connection by means of the roughing pump until a vacuum level is reached, where the system can be switched smoothly to the high vacuum pump. The bonding process is then performed under high vacuum conditions. Absolute pressure in the bypass-line must be accurately controlled during evacuation in order to prevent damaging of the high vacuum system. During the wafer bonding the vacuum inside the chamber has to be monitored to guarantee the required results.

Solution

A VSC43MA4 type rough vacuum transducer is used for controlling the bypass cycle. Its ceramic sensor measures the absolute pressure with the required accuracy and is nearly maintenance-free. The process pressure of the bonding procedure is monitored by means of a VSM transducer with Pirani/Cold Cathode combination sensor.

Benefits at a Glance

Analogline VSC43:

  • Chemical resistant ceramic sensor with FKM sealing
  • Gas type independent measurements
  • Standardized, linear output signal 0-10 V (four wire) or 4-20 mA (two wire)

Smartline VSM:

  • Wide range combi sensor Pirani /
    cold cathode
  • Robust sensor design
  • Insensitive against inrush of air

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  • Specifications
Specifications
Weight 0.5 kg
Dimensions 15 x 10 x 5 cm
Gas dependency independent of gas type
Measurement range mbar 1400 – 1 mbar
Measurement range Torr 1050 – 1 Torr
Materials in contact with vacuum Stainless steel, 1.4307, Al₂O₃, ceramic, FKM
max. overload 4 bar abs.
Accuracy ± 0.3 % f.s. (nonlinearity, hysteresis, repeatability)
Measurement rate 10 ms
Response time 20 ms
Voltage supply 9 – 30 VDC
Electrical connection M12 A, 5pin, male, lockable
Power consumption 0,6 W
Operating temperature +5…+60 °C
Storage temperature -40… + 70 °C
Output signal 4-20 mA
Article Number (choice of vacuum connection): stainless steel small flange DN 16 ISO-KF with G1/4- female thread
Dimensions 80 x 30 x 30 mm
Protection class IP54
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Fluxana XRF Solutions
Thyracont Vacuum Instruments
ACS Instruments
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Thermo Fisher
Intech Automazione S.r.l., Italy
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Utest Materiel Testing Instruments
Head Office:
Suite No. 10/1, 10th Floor, Sharjah Trade Centre, Shahrah-e-Liaquat, Karachi-74000, Pakistan
Lan No.: (+9221) 38889848
Cell: (+92) 324-2835650 / 300-2206315
Email: sales@anaequipments.com
Branch Office:
F-14, 1st Floor, Sohail Center, Main Dil Muhammad Road, Brandreth Road, Lahore
Cell: (+92) 315-0050228
Brief Profile
ANA Equipments is an indenting and trading company, whose aim is to provide state-of-the-art instruments/machines. We have been working hard to ensure that our clients do not face any issues with the products that they purchase from us.
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      • Process Industry
        • VSP6xMV – Carbonated Beverages
        • VD84 – Evacuation & Charging of Cooling Systems
        • VD6S2230 with VSP63MA4 – Short Path Distillation Systems
        • VSH8xD – Vacuum Furnaces
        • VD84 – Vacuum Insulation of Liquid Gas Tanks
        • VD81 – Vacuum Packaging
      • Mirror Coating
        • VSM7xD – Coating of Mirrors
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      • VSC43MA4 – Wafer Bonding
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        • VSP63MV – Freeze Drying
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