| Weight | 1.1 kg |
|---|---|
| Dimensions | 25 x 16 x 9 cm |
| Gas dependency | depending on gas type |
| Measurement range mbar | 1000 – 5e-10 mbar |
| Measurement range Torr | 750 – 5.0e-10 Torr |
| max. overload | 4 bar abs. |
| Accuracy | 1000 … 10 mbar: ca. 30 % f. r. | 10 … 1e-8 mbar: 10 % f. r. |
| Repeatability | 10 – 1e-2 mbar: 2 % f. r. | 1e-2 – 1e-8 mbar: 5% f. r. |
| Materials in contact with vacuum | Stainl. steel 1.4307, tungsten, nickel, glass, platinum, iridium, yttria oxide |
| Filaments / anodes | Yttria coated iridium |
| Emission current | 9 μA, 100 μA, 1.0 mA, 2,0 mA |
| Degas method | Ohmic heating of the anode |
| Response time | 50 ms (switching of emission current |
| Operating temperature | +5…+60 °C |
| Storage temperature | -40…+65 °C |
| Bake out temperature | Max. 180°C at the flange (voltage supply switched-off) |
| Voltage supply | 20 – 30 VDC |
| Power consumption | Max. 8 W, add. 1 W f. Degas, 0,8 W f. Relais/LCD, add. 1,8 W f. Profinet |
| Output Singal SL | 0 – 10 VDC, min. 10 kΩ, measuring range 1,219 – 8,6 VDC, log. except EtherCAT, Profinet |
| Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
| Switching output | 2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet |
| Electrical connection | SubD 15pole, male |
| Article Number (choice of vacuum connection): | DN 25 ISO-KF (VSH87), DN 40 CF-F (VSH89), DN 40 ISO-KF (VSH88) |
| Dimensions | 141 x 69 x 48 mm (VSH88) |
| Protection class | IP40, IP54 mit connector XB15SL05 |
| Weight | 475 g (VSH88) |
VSH8xD – Vacuum Furnaces
Vacuum Transducer ● RS485 ● Pirani/ Hot Cathode ● 1000 to 5e-10 mbar
The digital combination vacuum transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.Brazing, sintering or annealing of metals require an atmosphere free of oxygen. Therefore such processes are carried out under vacuum, partially using inert gas.
Challenge
The vacuum level must be monitored and kept constantly low during the process in order to avoid oxidation of the products. Our client had to measure the pressure in his high vacuum tube furnace near the gas inlet as well as at the vacuum port with high accuracy.
- Wide range combination sensor Pirani / Bayard Alpert
- Bayard Alpert with blowing resistant, yttrium coated double filament
- Longterm tests confirm excellent life time: up to 100,000 shock venting cycles
Solution
Two VSH transducers have the required wide measuring range and detect the pressure at the furnaces gas inlet and vacuum port with excellent precision. They are linked to the system PLC by their serial RS485 interfaces, so that both pressure levels can be directly visualized in a diagram. This allows to easily monitoring the pressure gradient inside the furnace tube.
Benefits at a Glance
Specifications
