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HomeVacuum Instruments (Thyracont) VSC43MA4 – Wafer Bonding
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VSC43MA4 – Wafer Bonding

Vacuum Transducer ● Piezo ● 1400 to 1 mbar ● 4-20 mA output

The compact VSC43 piezo vacuum transducer is used for measuring absolute pressure in the rough vacuum range. Due to its durable ceramic sensor it is nearly insensitive to dirt and contamination.

Wafer bonding is a procedural step in semiconductor technology, where two wafers are joined. For certain applications like the encapsulation of chip sensors this process is carried out under vacuum.

Challenge

When loaded the bond chamber is evacuated in a bypass connection by means of the roughing pump until a vacuum level is reached, where the system can be switched smoothly to the high vacuum pump. The bonding process is then performed under high vacuum conditions. Absolute pressure in the bypass-line must be accurately controlled during evacuation in order to prevent damaging of the high vacuum system. During the wafer bonding the vacuum inside the chamber has to be monitored to guarantee the required results.

Solution

A VSC43MA4 type rough vacuum transducer is used for controlling the bypass cycle. Its ceramic sensor measures the absolute pressure with the required accuracy and is nearly maintenance-free. The process pressure of the bonding procedure is monitored by means of a VSM transducer with Pirani/Cold Cathode combination sensor.

Benefits at a Glance

Analogline VSC43:

  • Chemical resistant ceramic sensor with FKM sealing
  • Gas type independent measurements
  • Standardized, linear output signal 0-10 V (four wire) or 4-20 mA (two wire)

Smartline VSM:

  • Wide range combi sensor Pirani /
    cold cathode
  • Robust sensor design
  • Insensitive against inrush of air

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  • Specifications
Specifications
Weight 0.5 kg
Dimensions 15 x 10 x 5 cm
Gas dependency independent of gas type
Measurement range mbar 1400 – 1 mbar
Measurement range Torr 1050 – 1 Torr
Materials in contact with vacuum Stainless steel, 1.4307, Al₂O₃, ceramic, FKM
max. overload 4 bar abs.
Accuracy ± 0.3 % f.s. (nonlinearity, hysteresis, repeatability)
Measurement rate 10 ms
Response time 20 ms
Voltage supply 9 – 30 VDC
Electrical connection M12 A, 5pin, male, lockable
Power consumption 0,6 W
Operating temperature +5…+60 °C
Storage temperature -40… + 70 °C
Output signal 4-20 mA
Article Number (choice of vacuum connection): stainless steel small flange DN 16 ISO-KF with G1/4- female thread
Dimensions 80 x 30 x 30 mm
Protection class IP54
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  • Menu
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  • About Us
  • Our Brands
    • Acoustic Control Systems, Germany
    • Advion Interchim Scientific, USA
    • Brady Corporation, USA
    • FLUXANA – XRF Application Solutions, GmbH
    • Inorganic Ventures, USA
    • MEFFA LAB, Finland
    • Mitorika Co., Ltd. Japan
    • Thyracont Vaccum Gauges, GmbH
    • OPSIS, Sweden
    • PCE Instruments, Germany
  • Product News
  • General Inquiry
  • Brady Custom Safety Signs Online
  • Misc. in Stock
    • APG – Absolute Pressure Gauge
    • Edwards Rotary Vane Vacuum Seal Kit
    • SGE Manual Syringe, 250 uL
    • B Braun Injekt Disposable Syringe 10ml
    • HT20IoT Temp. & Humidity Data Logger
  • Label Printers/Readers (Brady)
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    • Industrial Label Printers
    • Design Custom Safety Signs Online
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  • Vaccum Instruments (Thyracont)
    • Process Industry
      • VSP6xMV – Carbonated Beverages
        • VD84 – Evacuation & Charging of Cooling Systems
      • VD85 – Maintenance of Vacuum Pumps
      • VD6S2230 with VSP63MA4 – Short Path Distillation Systems
      • VSH8xD – Vacuum Furnaces
      • VD84 – Vacuum Insulation of Liquid Gas Tanks
      • VD81 – Vacuum Packaging
    • Mirror Coating
      • VSM7xD – Coating of Mirrors
    • Analytical & R&B
      • VSP63MV – Freeze Drying
    • VSC43MA4 – Wafer Bonding
    • Accessories
      • Vacuum Switches
      • Controller
    • VD800 Compact Vacuum Meters
    • VD8 Compact Vacuum Meter with Data Logger
    • Analog line Vacuum Transducers
    • Smartline Digital Vacuum Transducers
  • Gas Monitoring (Opsis)
    • Air Quality Monitors & Other AQM Products
    • Continuous Emissions Monitoring (CEM)
    • Monitoring Methods
  • Ultra Sonic Instruments (ACS)
    • Thickness Gauges
      • A1207 PENGAUGE
      • A1207D Level Gauge (Special Application)
      • A1208
      • A1209
      • A1210
      • A1270 EMAT
      • A1270 EMAT-HT
    • Flaw Detectors
      • A1211 MINI
      • A1212 MASTER
      • A1214 EXPERT
      • A1550 INTROVISOR
      • A1525 SOLO
      • A1610 Bondvisor (Special Application)
    • Concrete Testing
      • 1401UK SURFER
      • A1410 PULSAR
      • A1040 MIRA
      • A1020 MIRA LITE
      • A1220 MONOLITH 3D
    • Scanning Systems
      • A2075 SONET
      • A2051 SCAUT
      • A2072 INTROSCAN
  • Measuring Instruments (PCE)
    • Borescope
    • Brightness/Colorimeter
      • PCE-CMM 5
      • PCE-CSM 7
      • PCE-CMM 10
      • PCE-WSB 1
      • PCE-WNM 100
    • Dissolved Oxygen Meter
    • Handheld Digital Refractometer
    • Hygrometer/HVAC/Temp. Meter
    • Moisture/HVAC
      • Moisture/HVAC Meter PCE-DPM 3
      • Moisture/HVAC Meter PCE-DPM 10
    • Paint Gauge/Paint Tester
    • Particle Counter Dust Measuring
    • Ultrasonic Flow Meter PCE-TDS
    • Pressure Gauge
    • Ultrasonic Thickness Gauges
    • Roughness Tester (Paint/Surface)
    • Spectrophotometer
      • PCE-CMM 8
      • PCE-CSM 20
    • Torque Meter
      • PCE-CTT
  • Special Light Source (Mitorika)
    • D2 lamp (Deuterium lamp)
    • HCL (Hollow Cathode Lamp)
    • H2/He/Hg Lamps
  • XRF Application Solutions (Fluxana)
  • Sampler for Portable Inst. (Meffa)
  • Spectrophotometer Applications
    • SOLATION® ICP-MS (Advion)
    • AVANT™ (U) HPLC (Advion)
    • Compact Mass Spectro.. (Advion)
    • XRF Portable Handheld Analyzers
  • Standards/Reagents, Gas Analyzer
    • Inorganic Ventures
      • Conductivity Standards
      • Custom Standards
      • ICP & ICP-MS Standards
      • pH Buffer Standards
      • Water QC Standards
    • ASI Standards
      • Biodiesel Standards
      • Chlorine & Sulfur Standards
      • EPA Standards
      • Lead Standards in Gasoline & Isooctane
      • Lead Standards in Paint Coatings on Polyester Film
      • Lubricating Oil Standards For XRF, AA, ICP, AE
      • ROHS Standards
      • Sulfur Standards
    • Water, Oil / Gas Analyzers
      • Oxygen Analyzer
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